LASER PROCESSING MACHINE AND OPTICAL DEVICE MANUFACTURED BY USING THE MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a laser processing machine with which highly accurate laser processing is applied while observing a work of the object of processing.

SOLUTION: This optical device manufacturing apparatus ( laser processing apparatus ) 100 is provided with a processing-laser irradiation part 10 for applying a femto-second laser, a common focus optical observation part 20 for observing the work by a common focus optical system by irradiating the work with an observing laser, an objective lens 33 for condensing the femto-second laser and the observing laser onto the surface of the work, a work processing part 30 having an xyz-axis moving stage 34 on which the work is placed and the position of which is changeable and a control PC 40 for changing the position of the xyz-axis moving stage 34. The common focus optical observation part 20 has a galvano mirror 17 for adjusting the optical path of the observing laser and the processing laser irradiation part 10 has two mirrors 3d×3e for adjusting the optical path of the processing laser.

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