| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a pattern membrane by which the pattern membrane having a quadrangular cross-sectional shape in which two cross-sectional angles specified at both ends of long sides among mutually facing long sides and shot sides are mutually different is formed with high accuracy as much as possible. SOLUTION: After forming a covering membrane 105 so that inner walls 105WR, 105WL for demarcating a pattern formation area 105P in an opening 102K incline at mutually different angles (inclination anglesβR,βL) by forming a basic membrane 102 provided with the opening 102K and succeedingly performing filming processing (at a filming angleω) in the slant direction using filming technique (for example, an inclination spattering method) having anisotropy in the filming direction, the pattern membrane is formed in the pattern formation area 105P. When the pattern membrane is formed so that it has the quadrangular cross-sectional shape in which the two cross-sectional shapes are mutually different, setting accuracy of the two cross-sectional angles is enhanced. COPYRIGHT: (C)2006,JPO&NCIPI |
