| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of accurately detecting a state of an inspection object in a noncontact state when the inspection object is a conductor. SOLUTION: A sensor plate set is composed of a longitudinally long power supply sensor plate 20 impressed by an AC inspection signal, positioned in an inspection object conductor 15 by separating at a predetermined distance and supplying an inspection signal, and a longitudinally short detecting sensor plate 30 capable of being positioned in close vicinity to an inspection signal detecting part of the inspection object conductor 15 and detecting the inspection signal from the inspection object conductor 15, and is positioned at an alternately inverse position of mutual sensor plate positions, and an inspection is made to the same inspection object conductor by the respective sensor plate sets. COPYRIGHT: (C)2006,JPO&NCIPI
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