摘要 |
An optical assembly supported in an arrangement, especially in an objective (1, 8) or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens (34, 35), a mirror, or an aperture (9), wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator (10, 22, 25) is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator (10, 22, 25) and the element to be influenced by the manipulator (10, 22, 25) in the interior of the arrangement. |
申请人 |
CARL ZEISS SMT AG;BIEG, HERMANN;AUBELE, KARL-EUGEN;KWAN, YIM-BUN, PATRICK;XALTER, STEFAN |
发明人 |
BIEG, HERMANN;AUBELE, KARL-EUGEN;KWAN, YIM-BUN, PATRICK;XALTER, STEFAN |