| 摘要 |
PROBLEM TO BE SOLVED: To provide a classification method for efficiently classifying finely divided particles having objective particle sizes, and to provide a film forming method using the classification method. SOLUTION: The classification method is a method for classifying finely divided particles dispersed in a carrying gas while making them to flow in a carrying pipe. In the method, a plurality of porous filters each having a plurality of holes are arranged in the carrying pipe so that positions of holes do not coincide with each other with respect to the advancing direction of the finely divided particles dispersed in the carrying gas, and the porous filters are heated. COPYRIGHT: (C)2006,JPO&NCIPI
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