ENHANCEMENT - DEPLETION FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD OF MANUFACTURE

摘要

The invention relates to a transistor structure with both enhancement and depletion mode transistors. In order to allow good control over the manufacture of both transistors, a first Schottky layer (10) and a second Schottky layer (12) are used made of first and second semiconductor materials respectively. The first and second materials having band gaps of at least 0.5V. For an n-type transistor the second Schottky layer has a low conduction band discontinuity with the first Schottky layer. Both the first and the second Schottky layers are used as etch stops in the method for making the transistor. The transistor is preferably a HEMT.