发明名称 ELECTROPROCESSING PROFILE CONTROL
摘要 A method and apparatus for electroprocessing a substrate is provided. In one embodiment, a method for electroprocessing a substrate includes the steps of biasing a first electrode to establish a first electroprocessing zone between the electrode and the substrate, and biasing a second electrode disposed radially outward of substrate with a polarity opposite the bias applied to the first electrode.
申请公布号 WO2006081285(A2) 申请公布日期 2006.08.03
申请号 WO2006US02595 申请日期 2006.01.24
申请人 APPLIED MATERIALS, INC.;MANENS, ANTOINE, P.;GALBURT, VLADIMIR;WANG, YAN;DUBOUST, ALAIN;OLGADO, DONALD, J.K.;CHEN, LIANG-YUH 发明人 MANENS, ANTOINE, P.;GALBURT, VLADIMIR;WANG, YAN;DUBOUST, ALAIN;OLGADO, DONALD, J.K.;CHEN, LIANG-YUH
分类号 B23H5/08;B24D99/00;B24B37/04;H01L21/321 主分类号 B23H5/08
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