Magnetic dust separator for lasers operates in a laser chamber containing a gas using an arrangement of electrodes to generate a gas discharge

摘要

A dust separator (20) operates in a laser chamber (11) that contains a gas, in which a gas discharge is generated by an arrangement (12) of electrodes. The dust separator consists of an arrangement of magnets that generates a magnetic field. - An INDEPENDENT CLAIM is also included for a gas excimer laser with a laser chamber for holding a dust separator according to the present invention.