| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam-machining method capable of easily removing debris by forming an oxidized film on the surface of a work and depositing the debris on the formed oxidized film while cutting the work with laser beams, then stripping the oxidized film. <P>SOLUTION: In this method, the work 10 is irradiated with the laser beams to cut the work 10 by causing an ablation reaction at a machining point, and a cut groove 90 is formed on the work 10 by moving the machining point. In this case, an inert gas and an oxygen gas are supplied into the vicinity of the machining point of the work 10, or the inert gas is supplied into the vicinity of the machining point in the state that the work 10 is placed in the atmosphere, thereby forming the oxidized film 91 on both sides of the cut groove 90 on the surface at the laser beam incident face side of the work 10 while forming the cut groove 90 on the surface of the work 10. The debris 923 are deposited on the oxidized film 91, and the oxidized film 91 is stripped to remove the debris 923 simultaneously. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
