| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical circuit, wherein cost reduction and mass production are attained. SOLUTION: The optical circuit substrate is constituted so that an optical transmission line which is covered with a metallic film in the circumference other than in the longitudinal direction of the groove and which is composed of polyimide, is formed in the groove of a grooved polyimide base material provided on a metallic foil. The manufacturing method of this optical circuit substrate includes: a metallic foil forming process for forming a metallic foil having a grooved polyimide layer by forming a grooved polyimide layer on one face of the metallic foil; a metallic film forming process for forming a metallic film on at least all inner faces of the groove in a metallic foil having the grooved polyimide layer; a polyimide filling process for filling and curing polyimide inside the groove or only further above the groove which is formed with the metallic film on the inner face; and an optical transmission line forming process for forming an optical transmission line by covering with a metallic film the exposed face other than in the longitudinal direction of the polyimide formed in the groove and, along with the metallic film formed in the groove, by covering with the metallic film the circumference other than in the longitudinal direction of the polyimide in the groove. COPYRIGHT: (C)2006,JPO&NCIPI |
