发明名称 |
Method for designing a micro electromechanical device with reduced self-actuation |
摘要 |
A method is described for designing a micro electromechanical device in which the risk of self-actuation of the device in use is reduced. The method includes locating a first conductor in a plane and locating a second conductor with its collapsible portion at a predetermined distance above the plane. The method also includes laterally offsetting the first conductor by a predetermined distance from a region of maximum actuation liability. The region of maximum actuation liability is where an attraction force to be applied to activate the device is at a minimum.
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申请公布号 |
US2006168788(A1) |
申请公布日期 |
2006.08.03 |
申请号 |
US20050317370 |
申请日期 |
2005.12.23 |
申请人 |
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) |
发明人 |
TILMANS HENDRIKUS;ROTTENBERG XAVIER |
分类号 |
H04R17/00 |
主分类号 |
H04R17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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