| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive resist composition having high resolution and capable of enhancing DOF. <P>SOLUTION: In the positive resist composition, a resin component (A) whose alkali solubility is increased by the action of an acid has at least one constitutional unit (a1) selected from the group consisting of constitutional units represented by a general formula (a1-01) and constitutional units represented by a general formula (a1-02), and an acid generator component (B) which generates an acid upon exposure contains an onium salt-based acid generator (B1) having an anionic moiety represented by a general formula (b-3) or (b-4). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
