| 摘要 |
PROBLEM TO BE SOLVED: To provide a manipulator adapted to shorten a halt time of a device at a probe replacement time to improve the operation rate of the device. SOLUTION: A vacuum chamber is provided with an air lock chamber, which is joined to the vacuum chamber in the main body through vacuum bellows. A probe holder is provided in the air lock chamber to move a probe with the air lock chamber all together by means of a transport mechanism provided in the main body. The air lock chamber allows evacuation from an evacuation port and a vacuum valve is used to partition between the air lock chamber and the vacuum chamber. A second transport mechanism is provided to enable the probe to move between the air lock chamber and the vacuum chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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