| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein minute foreign matters or defects are disturbances on the detection thereof, since an electric noise is generated, when converting a signal charge generated in the inside by photoelectric transfer into a voltage to be read out, resulting in embedding into the electrical noise a very weak detection signal, obtained by detecting reflection-scattered light from the minute foreign matters or defects, when using a CCD sensor as a photodetector in a foreign matter defect inspecting device. SOLUTION: The electron multiplying type CCD sensor is used as the photodetector, electrons generated by the photoelectric transfer is multiplied to be read out thereafter, a signal by input light gets relatively large thereby, with respect to the electric noise to detect very weak light compared with a conventional CCD, and the micro foreign matters or defects can be detected, as compared to prior art. COPYRIGHT: (C)2006,JPO&NCIPI
|
