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发明名称
Dispositif de régulation de température pour le traitement thermique d'une matière semi-conductrice
摘要
申请公布号
FR1416576(A)
申请公布日期
1965.11.05
申请号
FR19640989442
申请日期
1964.09.25
申请人
LA RADIOTECHNIQUE
发明人
RIBARD PIERRE
分类号
H01L21/24;H01L31/00
主分类号
H01L21/24
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