| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating gyroscope element capable of maintaining sensitivity in angular velocity detection of the vibrating gyroscope element, securing support strength, and achieving compactness, and also provide both a support structure of the same and a gyroscope sensor. <P>SOLUTION: The vibrating gyroscope element comprises, in the same plane, a base part 10; a pair of vibrating arms 11a and 11b for detection linearly extended from the base part 10 to both sides; a pair of connecting arms 13a and 13b extended from the base part 10 to both sides in directions which intersect with the vibrating arms 11a and 11b for detection at right angles; each pair of vibrating arms 14a, 14b, 15a and 15b for drive extended from a tip part of each connecting arm to both sides and intersecting with the connecting arms; two pairs of beams 20a, 20b, 21a and 21b each extended from the base part 10 along the arms for detection; and a pair of supporting parts 22a and 22b to which each beam extended in the same direction is connected. The supporting parts 22a and 22b are arranged outside the vibrating arms for detection between the vibrating arms for drive in the directions of the extension of the vibrating arms for detection. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
