| 摘要 |
PROBLEM TO BE SOLVED: To provide a precise shape measuring apparatus which can easily realize a modulation pattern at a photographing step, is easy to implement the modulation pattern and determines a distance (phase) from refection pulse light returning along the direction of an object to be measured. SOLUTION: The shape measuring apparatus includes an irradiation means 3 for irradiating the object to be measured 2 with an irradiation pattern being a light pattern, and photographing means 4-6 disposed at positions optically identical to that of the irradiation means 3 to obtain a photographed pattern being a light pattern reflected by the surface of the object to be measured 2, and computes a surface shape of the object to be measured 2 from the photographed pattern. The object to be measured 2 is disposed in a prescribed range of distance from the irradiation means 3, and the irradiation means 3 irradiates the object to be measured 2 with the irradiation pattern having a certain intensity modulated with an angular frequencyω, and the photographing means 4-6 modulate reflection light which is reflected by the surface of the object to be measured 2 and returns again to the photographing means 4-6 by passing through the path identical to that of the irradiation, with the angular frequencyωand a phaseϕd, and then detect a temporal average of light intensity, thereby deriving the distance L of the object to be measured 2 from the light intensity obtained under a plurality of modulation conditions. COPYRIGHT: (C)2006,JPO&NCIPI
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