| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder and an ion beam processing device capable of preparing easily a favorable sample suitable for observation. SOLUTION: A sample setting part 9 has a sample bonding face 10. A shielding material guide part 12 is arranged on the sample setting part 9, and the shielding material guide part 12 is fixed in the sample setting part 9. The shielding material guide part 12 has a shielding material guide face 13. The sample bonding face 10 is positioned at a place lowered by D=40μm from the shielding material guide face 13. Since the sample bonding face 10 is formed in the position lowered by 40μm from the shielding material guide face 13 by this manner, the sample 7 is brought into a state projected frontwards by 60μm from the shielding material guide face 13 as shown in Fig.(d), when the sample 7 with 100μm of thickness is attached onto the sample bonding face 10. A shielding material 16 having about 20μm of thickness is set on the shielding material guide face 13. COPYRIGHT: (C)2006,JPO&NCIPI
|
