| 摘要 |
A micromechanical component having a substrate conductive in at least some regions; an elastically deflectable diaphragm, which is conductive in at least some regions, arches over a front side of the substrate, and is electrically insulated from the substrate, the diaphragm having an inner region (I; I') and an edge region (RB; RB'); and a hollow space (H), which is provided between the substrate (1) and the diaphragm (M); the inner region (I; I') having a cross-section that is modified in comparison with the edge region (RB; RB'), which means that the bending of the inner region (I; I') is less than that in the case of an identical cross-section.
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