发明名称 |
Apparatus and method for removing bubbles from a process liquid |
摘要 |
The present invention is directed to methods and apparatuses for removing bubbles from a process liquid. The process liquid can comprise a plating solution used in a plating tool. The process liquid is supplied to a tank. A plurality of streams of the process liquid are directed towards a surface of the process liquid from below. This can be done by feeding the process liquid to a flow distributor comprising a plurality of openings providing flow communication between an inner volume of the flow distributor and a main volume of the tank. Before leaving the tank through an outlet, the process liquid flows through a flow barrier.
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申请公布号 |
US2006169579(A1) |
申请公布日期 |
2006.08.03 |
申请号 |
US20050201970 |
申请日期 |
2005.08.11 |
申请人 |
HARTZ HELGE;NOPPER MARKUS;PREUSSE AXEL |
发明人 |
HARTZ HELGE;NOPPER MARKUS;PREUSSE AXEL |
分类号 |
C25B15/08 |
主分类号 |
C25B15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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