| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion irradiation apparatus capable of achieving both of clean ion irradiation for an object to be irradiated and close monitoring of ion beams. SOLUTION: The ion irradiation apparatus comprises: a beam scanner 82 having a function of deflecting an ion beam 30 that has been derived from an ion source 20 and passed through a mass separator 32 into two deflecting directions along an X direction and a function of scanning the ion beam along the X direction in each of the two deflecting directions; two beam collimators 86, 88 for bending back the ion beams derived from the beam scanner 82 to make parallel beams; a treatment chamber 90 to which the ion beams 30 derived from the beam collimator 86 are introduced and in which treatment such as ion injection is performed by applying the ion beams to the object to be irradiated 2; a driving mechanism 94 for mechanically driving the object 2 in a Y direction; and a measurement chamber 92 to which the ion beams 30 derived from the ion beam collimator 88 are introduced and in which only measurement of the ion beams is performed using a beam measuring instrument 96. COPYRIGHT: (C)2006,JPO&NCIPI
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