发明名称 |
Method and apparatus for retrofitting existing real time control systems for monitoring, controlling, and distributing chemicals during electroplating |
摘要 |
Chemical treatment process control, including a virtual sensor based upon artificial intelligence that automatically computes and predicts additive concentrations in chemical baths used in manufacturing to compensate for the lag time in obtaining data from real-time analyzers (RTA). Once actual measurement data is obtained, bath concentrations can be further adjusted if necessary. Also disclosed is the retrofitting of a RTA with a controller where the data signal from the RTA has a proprietary communication protocol that is converted by hardware and/or software into a signal having an open communication protocol for transmission to the controller for controlling electrochemical bath concentration. Further disclosed is a method of controlling chemical concentration of electrochemical baths by predicting the depletion of chemicals during manufacture and causing dosing and/or draining of a portion of the bath during the time delay between RTA analyses. An algorithm written into program language and compiled into an executable format can be used in the controllers.
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申请公布号 |
US2006172427(A1) |
申请公布日期 |
2006.08.03 |
申请号 |
US20050296067 |
申请日期 |
2005.12.07 |
申请人 |
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发明人 |
GERMOUNI OMAR;ZDUNEK ALAN D. |
分类号 |
G01N33/00 |
主分类号 |
G01N33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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