| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass master, and a manufacturing method for the glass master in which a manufacturing process is simplified, and a protruding part can be formed without using a lower layer, and to provide an optical disk substrate, and a manufacturing method for the optical disk substrate thereof. <P>SOLUTION: In the manufacturing method for the glass master in which, after applying a photoresist 2 on a glass substrate 1, exposure and development are performed by laser beam irradiation, and a photo rest pattern 7 having the protruding parts at both ends is formed and produced, the photoresist 2 has a thickness of 20-200 nm, a glass transition point temperature of 60-150°C, and a B value of 4.0 μm<SP>-1</SP>-6.5 μm<SP>-1</SP>at a exposure wavelength of 200-300 nm, and the wavelength of the laser beam is 200-300 nm. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
