CERAMIC TOOL AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a tool used for the manufacture and the assembling of an electronic component and capable of reducing soiling due to abrasion powder and machining cost and having a thermal expansion coefficient controlled to be suitable to a material to be treated having a thermal expansion coefficient.

SOLUTION: In a method of manufacturing the tool, a step for using a formed body made of a powdery mixture containing silicon as a base material and green-processing the body to have a shape and dimension close to a final shape, a step for heating to convert silicon to silicon nitride under a nitrogen atmosphere without substantially changing the dimension and if necessary, a final processing step is carried out.

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