| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical modulator characterized by a high speed, low driving voltage, small DC drift and satisfactory yield of production. SOLUTION: The optical modulator includes a substrate (1) having an electrooptical effect, an optical waveguide (3) formed on the substrate, an electrode consisting of a central conductor (4a) formed on one surface side of the substrate and ground conductors (4a, 4b), and optical waveguides (3a, 3b) for interaction for modulating the phase of light, wherein a first buffer layer (9) formed in a portion on the top face of the substrate, a conductive layer (10) formed atop the first buffer layer and formed to extend up to the top face of the substrate, and a second buffer layer (11) formed in at least a portion of the top face of the conductive layer are formed on the lower side of at least one of the central conductor or the ground conductor, and at least one of the central conductor and the ground conductor comes into electrical contact with the conductive layer. COPYRIGHT: (C)2006,JPO&NCIPI |
