| 摘要 |
<P>PROBLEM TO BE SOLVED: To irradiate an optical alignment layer in a light irradiation region with a polarized light being diffused light without causing fluctuations of the polarization axis, even if an optical element, through which light is transmitted or on which light is reflected, is arranged in its optical path in an apparatus for irradiating the optical alignment layer with the polarized light being a diffuse light. <P>SOLUTION: A work 30, on which the optical alignment layer 31 is formed, is mounted on a work stage 32, and the whole of the work stage 32 is housed in a sample chamber 1. Inert gas, such as gaseous nitrogen, is introduced into the sample chamber 1 or is degassed therefrom. A light transmissive window 3 is formed at an upper part of the sample chamber 1, light from a light irradiation section 20 is transmitted through the light transmissive window 3, is polarized by a wire grid polarizing element 10 provided between the light transmissive window 3 and the work stage and irradiates the optical alignment layer 31 on the work stage 32. Since the optical element for transmitting or reflecting light is not provided between the polarizing element 10 and the optical alignment layer 31, rotation of the axis of polarization will not be produced and the fluctuations of the axis of polarization will not be produced. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
