| 摘要 |
PROBLEM TO BE SOLVED: To facilitate removal work of a body to be polished by preventing the sticking of the body to be polished to the surface of a solid grinding wheel of the upper grinding wheel unit without requiring a large control mechanism and a large peeling mechanism in a double-disc plane polishing device. SOLUTION: The solid grinding wheels 2, 2 held by lapping surface plates 1, 1 of the upper/lower grinding wheel units 100, 200 are divided into grinding wheel segments 21 by a first groove part 31. A second groove part 32 is formed to the surface of each grinding wheel segment 21. The total number of the second groove parts 32, 32a of the grinding wheel segments 21 of the upper grinding wheel unit 100 is increased compared with that of the second groove parts 32 of the grinding wheel segments 21 of the lower grinding wheel unit 200. COPYRIGHT: (C)2006,JPO&NCIPI |
