| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing apparatus realizing washing for a long period of time. SOLUTION: The washing apparatus 1 is provided with a nozzle 6 discharging a mixture of gas and a liquid for washing a matter 3 to be cleaned toward the matter to be cleaned, a gas feeding mechanism 8 for feeding the gas to the nozzle 6 with prescribed gas discharging pressure, and a liquid feeding mechanism 9 for feeding the liquid to the nozzle. The liquid feeding mechanism 9 is provided with a liquid pressure tank 20 for storing the liquid, a liquid feeding line 21 for feeding the liquid of a smaller flow rate per a period than the gas with the prescribed gas discharging pressure from the tank 20 to the nozzle 6, and a liquid supplementing mechanism 22 for supplementing the liquid by feeding the liquid to the tank 20 from outside with pressure equal to or higher than the liquid discharging pressure. The liquid feeding mechanism 9 is constituted so as to be able to supplement the liquid to the tank 20 from the liquid supplementing mechanism 22, while feeding the liquid to the nozzle 6 from the tank 20 through the liquid feeding line 21. COPYRIGHT: (C)2006,JPO&NCIPI
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