发明名称 Measuring apparatus and measuring method
摘要 A measuring apparatus is disclosed which includes an interferometer for measuring a wavefront of light transmitted through a test object by interference between light under test passed through the test object and reference light, and measures a polarization characteristic of the test object. The measuring apparatus has a measuring unit for measuring a polarization characteristic matrix in a pupil plane of the test object while the reference light is blocked or fringe scan is performed.
申请公布号 US2006170932(A1) 申请公布日期 2006.08.03
申请号 US20060345220 申请日期 2006.02.02
申请人 CANON KABUSHIKI KAISHA 发明人 HAYASHI NAOTO;KURAMOTO YOSHIYUKI
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
主权项
地址