PLASMA PROCESSING APPARATUS,申请号KR20050008022-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR20060087148(A)	申请公布日期	2006.08.02
申请号	KR20050008022	申请日期	2005.01.28
申请人	ADP ENGINEERING CO., LTD.	发明人	LEE, YOUNG JONG;CHOI, JUN YOUNG;JUNG, YOUN JU
分类号	H01L21/205;H01L21/02	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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