发明名称 |
Piezoelectric/electrostrictive film type elements and process for producing the same |
摘要 |
<p>An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate (1) made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section (5) integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode (2), a piezoelectric/electrostrictive layer (3) of a lead element-containing composition, and an upper electrode (4), wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30% by adjusting the atmosphere during sintering. <IMAGE></p> |
申请公布号 |
EP1148561(B1) |
申请公布日期 |
2006.08.02 |
申请号 |
EP20010303594 |
申请日期 |
2001.04.19 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
TAKEUCHI, YUKIHISA;NANATAKI, TSUTOMU;KIMURA, KOJI;TAKAHASI, MASAO |
分类号 |
H01L41/09;B81B3/00;H01L41/314;H01L41/43 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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