发明名称 |
METHOD AND DEVICE FOR PACKAGING A SUBSTRATE |
摘要 |
A package structure and method of packaging for an interferometric modulator. A thin film material (820) is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator. |
申请公布号 |
KR20060087382(A) |
申请公布日期 |
2006.08.02 |
申请号 |
KR20050087404 |
申请日期 |
2005.09.20 |
申请人 |
IDC, LLC |
发明人 |
PALMATEER LAUREN;CUMMINGS WILLIAM J.;GALLY BRIAN J.;MILES MARK W.;SAMPSELL JEFFREY B.;CHUI CLARENCE;KOTHARI MANISH |
分类号 |
G02F1/01 |
主分类号 |
G02F1/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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