| 发明名称 |
PIEZOELECTRIC ELEMENT, INK-JET HEAD WITH SAME, AND THEIR MANUFACTURING METHODS |
| 摘要 |
A piezoelectric element 1 includes a lower electrode 2, a piezoelectric film 3 and an upper electrode 4 stacked in this order. The surface of the upper electrode 4 of the piezoelectric element 1 is exposed to a zirconium compound 6. |
| 申请公布号 |
EP1686632(A1) |
申请公布日期 |
2006.08.02 |
| 申请号 |
EP20040773547 |
申请日期 |
2004.09.24 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
NAKAGAWA, TOHRU;TORII, HIDEO |
| 分类号 |
H01L41/18;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L41/04;H01L41/09;H01L41/187;H01L41/22;H01L41/29;H02N2/00 |
主分类号 |
H01L41/18 |
| 代理机构 |
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