发明名称 PATTERN FORMING METHOD AND WIRING PATTERN FORMING METHOD
摘要 To provide a pattern forming method enabling a thin film to be patterned with high precision by easy and low cost techniques. A thin film 2 is provided on a base material 1 containing a sublimable dyestuff, light is irradiated to the base material 1 , and heat generated by the light irradiation sublimates the sublimable dyestuff in a desired region, thereby removing the thin film 2 corresponding to an irradiation region where the light is irradiated to thereby pattern this thin film 2.
申请公布号 KR100608122(B1) 申请公布日期 2006.08.02
申请号 KR20040063269 申请日期 2004.08.11
申请人 发明人
分类号 G03F7/004;B05D3/06;B05D3/12;B41M5/24;B41M5/46;G02B5/20;G02F1/1335;G02F1/1343;G03C8/00;G03F7/00;G03F7/36;H01L21/20;H01L51/00;H01L51/50;H05B33/10;H05B33/14;H05B33/26;H05K3/06;H05K3/14 主分类号 G03F7/004
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