| 发明名称 |
APPARATUS FOR FIXING AN ELECTRODE IN PLASMA POLYMERIZING APPARATUS |
| 摘要 |
An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall. |
| 申请公布号 |
EP1262093(A4) |
申请公布日期 |
2006.08.02 |
| 申请号 |
EP20010996986 |
申请日期 |
2001.11.16 |
| 申请人 |
LG ELECTRONICS, INC. |
发明人 |
YOUN, DONG-SIK;HA, SAM-CHUL |
| 分类号 |
H01J37/32;H05H1/46;C08G83/00;H05H1/34;H05H1/38 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
