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发明名称
TEST ELEMENT GROUP STRUCTURES HAVING 3 DIMENSIONAL SRAM CELL TRANSISTORS
摘要
申请公布号
KR20060086756(A)
申请公布日期
2006.08.01
申请号
KR20050007740
申请日期
2005.01.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LIM, BO TAK;SEO, JONG SOO
分类号
H01L27/11
主分类号
H01L27/11
代理机构
代理人
主权项
地址
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