METHOD FOR MANUFACTURING METAL SILICIDE LAYER OF THE SEMICONDUCTOR DEVICE,申请号KR20030060872-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING METAL SILICIDE LAYER OF THE SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100607782(B1)	申请公布日期	2006.08.01
申请号	KR20030060872	申请日期	2003.09.01
申请人		发明人
分类号	H01L21/24	主分类号	H01L21/24
代理机构		代理人
主权项
地址

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