Method of efficiently converting-to-array and compressing data in a process for converting mask patterns of a LSI

摘要

In the method of converting-to-array according to the present invention, array configuration data is created by classifying the patterns congruent with a master pattern, which is a reference graphic for repetition, in the patterns arranged as mask patterns of a LSI, so that the number of the repetitions of the congruent pattern is the largest one when the congruent pattern is arranged repeatedly with a predetermined repetition pitch.