OPERATION METHOD OF ION SOURCE AND ION BEAM IRRADIATION APPARATUS,申请号KR20010025054-传众专利搜索

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发明名称	OPERATION METHOD OF ION SOURCE AND ION BEAM IRRADIATION APPARATUS
摘要
申请公布号	KR100607721(B1)	申请公布日期	2006.08.01
申请号	KR20010025054	申请日期	2001.05.09
申请人		发明人
分类号	H01J37/317	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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