发明名称 Thin-film magnetic head and method of forming the same
摘要 In a thin-film magnetic head having a multilayered film developing a magnetoresistive effect, which is present between an upper shielding layer and a lower shielding layer both formed above an AlTiC substrate, a recess for defining the lower shielding layer is formed in an underlayer present on a surface of the AlTiC substrate, and a lower shielding layer made of NiFe is provided in the recess. A SiO<SUB>2 </SUB>film is interposed between the underlayer and the lower shielding layer.
申请公布号 US7083989(B2) 申请公布日期 2006.08.01
申请号 US20040950327 申请日期 2004.09.23
申请人 ALPS ELECTRIC CO., LTD. 发明人 SATO KIYOSHI
分类号 H01L21/00;G11B5/31;G11B5/39;G11B5/40;H01L43/08 主分类号 H01L21/00
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