发明名称 Organometallic precursor for forming metal film or pattern and method of forming metal film or pattern using the same
摘要 The object of this invention is to provide an organometallic precursor for forming a metal film or pattern and a method of forming the metal film or pattern using the same. More particularly, the present invention provides an organometallic precursor containing a hydrazine-based compound coordinated with a central metal thereof, and a method of forming a metal film or pattern using the same. Further, the present invention provides a composition containing an organometallic compound and a hydrazine-based compound, and a method of forming a metal film or pattern using the same. Additionally, the present invention is advantageous in that a pure metal film or pattern is formed using the organometallic precursor or composition through a simple procedure without limiting atmospheric conditions at a low temperature, and the film or pattern thus formed has excellent conductivity and morphology. Therefore, the film is useful in an electronic device field including flexible displays and large-sized TFT-LCD.
申请公布号 US7084288(B2) 申请公布日期 2006.08.01
申请号 US20030676031 申请日期 2003.10.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SON HAE JUNG;HWANG EUK CHE;LEE SANG YOON;HWANG SOON TAIK;YUN BYONG KI
分类号 C07F15/02;C07F1/00;C07F3/00;C23C16/00;H05K3/10 主分类号 C07F15/02
代理机构 代理人
主权项
地址