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发明名称
FABRICATION METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE HAVING SILICIDE LAYER FABRICATED THEREBY
摘要
申请公布号
KR20060086144(A)
申请公布日期
2006.07.31
申请号
KR20050007068
申请日期
2005.01.26
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YOUN, KI SEOG;AHN, JONG HYON;BAE, SU GON
分类号
H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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