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发明名称
A METHOD FOR DEPOSITING THIN FILM USING ALD
摘要
申请公布号
KR20060086241(A)
申请公布日期
2006.07.31
申请号
KR20050007249
申请日期
2005.01.26
申请人
INTEGRATED PROCESS SYSTEMS LTD.
发明人
KIM, SOO HYUN;LEE, SAHNG KYOO;SEO, TAE WOOK;LEE, SANG IN;CHANG, HO SEUNG
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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