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发明名称
AN APPARATUS AND METHOD FOR DETECTING VARIATION OF PRESSURE IN A BAKE UNIT USED TO BAKE WAFER
摘要
申请公布号
KR20060086107(A)
申请公布日期
2006.07.31
申请号
KR20050007006
申请日期
2005.01.26
申请人
MAGNACHIP SEMICONDUCTOR, LTD.
发明人
SEONG, IK JOONG
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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