发明名称 DIELECTRIC STRUCTURE HAVING A HIGH DIELECTRIC CONSTANT, METHOD OF FORMING THE DIELECTRIC STRUCTURE, NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE INCLUDING THE DIELECTRIC STRUCTURE, AND METHOD OF MANUFACTURING THE NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE
摘要
申请公布号 KR20060085735(A) 申请公布日期 2006.07.28
申请号 KR20050006547 申请日期 2005.01.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JONG CHEOL;KIM, SUNG TAE;KIM, YOUNG SUN;YOO, CHA YOUNG;PARK, YOUNG GEUN;YEO, JAE HYUN;KIM, YUN SEOK;LIM, HA JIN;CHOI, JAE HYOUNG;NAM, GAB JIN
分类号 H01L21/8247 主分类号 H01L21/8247
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