Pumping chamber volume variation measuring method for micropump, involves placing pumping membrane in one position by deformation generated in mechanical manner so that fluid passage in chamber is absent

摘要

The method involves placing a pumping membrane (133) in two positions, and activating an interferometry for directing light beams on a reference side. The membrane is placed in one of the positions by deformation generated in a mechanical manner so that fluid passage in a pumping chamber is absent. Images of the side are obtained in the respective positions. The images are compared for determining variation of volume of the chamber. An independent claim is also included for an assembly for measuring volume by optical profilometry.