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发明名称
Method for manufacturing semiconductor device having dual plug
摘要
申请公布号
KR100604920(B1)
申请公布日期
2006.07.28
申请号
KR20040102217
申请日期
2004.12.07
申请人
发明人
分类号
H01L21/283;H01L21/28
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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