摘要 |
The present invention provides a semiconductor structure that includes a substrate having a crystal lattice; a first structure formed in a first region of the substrate, the first structure includes at least a heterostructure that generates a lattice stress in said crystal lattice in the first region; and a second structure surrounding the first structure for preventing lattice stress from propagating outward from the first region of the substrate. The present invention also provides various methods for forming the semiconductor structure as well as other like structures.
|