| 发明名称 |
Film formation method, electro-optical device manufacturing method and electronic apparatus |
| 摘要 |
A film formation method includes: ejecting liquid onto a substrate; and drying the liquid ejected onto the substrate by a drying device before an amount of a solvent evaporation of the liquid exceeds 40%.
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| 申请公布号 |
US2006164591(A1) |
申请公布日期 |
2006.07.27 |
| 申请号 |
US20060333707 |
申请日期 |
2006.01.17 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
HIRUMA KEI |
| 分类号 |
B05D3/02;B05D5/06;B05D5/12;G02F1/13 |
主分类号 |
B05D3/02 |
| 代理机构 |
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