| 摘要 |
PROBLEM TO BE SOLVED: To easily form semiconductor device including a vibrating element such as an vibration power generating element constituted with an vibrator having small natural frequency. SOLUTION: A vibration power generating element (vibration element) formed of a couple of fixed electrodes 104 and a vibration electrode 106 formed of gold (Au) between these fixed electrodes to vibrate is deposited on a substrate 101 where a semiconductor integrated circuit or the like is formed. The vibration electrode 106 is separately bridged on the substrate 101 with a supporting member 105 coupled with a supporting member 103 fixed on the substrate 101. Moreover, the vibration electrode 106 bridged with the supporting member 105 functioning as a spring can be deviated (vibrated) in the direction toward the fixed electrode 104. These supporting member 105 and vibration electrode 106 are formed as the integrated structure formed of Au, and have the function of adjusting vibrators. COPYRIGHT: (C)2006,JPO&NCIPI
|
